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Chemistry of the Semiconductor Industry (1989)

by Moss, S J

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Description

This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

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Product Details

  • Springer Brand
  • Feb 28, 1989 Pub Date:
  • 0216920051 ISBN-10:
  • 9780216920057 ISBN-13:
  • English Language
  • 9.21 in * 1 in * 6.14 in Dimensions:
  • 4 lb Weight: