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Physics of Micro/Nano-Fabrication (1992)

by Brodie, Ivor

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Description

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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Product Details

  • Springer Brand
  • Jan 31, 1993 Pub Date:
  • 0306441462 ISBN-10:
  • 9780306441462 ISBN-13:
  • English Language
  • 10 in * 1.44 in * 7 in Dimensions:
  • 7 lb Weight: