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Rapid Thermal Processing of Semiconductors (1997)

by Borisenko, Victor E

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Description

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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Product Details

  • May 31, 1997 Pub Date:
  • 0306450542 ISBN-10:
  • 9780306450549 ISBN-13:
  • English Language