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Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications

by Guittienne, Philippe

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Description

Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.

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Product Details

  • Feb 28, 2024 Pub Date:
  • 0750352973 ISBN-10:
  • 9780750352970 ISBN-13:
  • English Language