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Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (1998)
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Description
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
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Product Details
- Mar 31, 1998 Pub Date:
- 0792350073 ISBN-10:
- 9780792350071 ISBN-13:
- English Language
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