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Atomic Layer Deposition for Semiconductors (Softcover Reprint of the Original 1st 2014)

by Atomic Layer Deposition for Semiconductors (Softcover Reprint of the Original 1st 2014)

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Description

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

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Product Details

  • Springer Brand
  • Aug 23, 2016 Pub Date:
  • 1489979433 ISBN-10:
  • 9781489979438 ISBN-13:
  • 273.0 pages Paperback
  • English Language
  • 9.25 in * 0.63 in * 6.1 in Dimensions:
  • 1 lb Weight: