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Introduction to Focused Ion Beam Nanometrology

by Introduction to Focused Ion Beam Nanometrology

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Description

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

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Product Details

  • Morgan & Claypool Brand
  • Oct 1, 2015 Pub Date:
  • 1643278460 ISBN-10:
  • 9781643278469 ISBN-13:
  • English Language
  • 104.0 pages Hardcover
  • 10 in * 0.25 in * 7 in Dimensions:
  • 1 lb Weight: