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Chemistry of Atomic Layer Deposition

by Chemistry of Atomic Layer Deposition

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Description

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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Product Details

  • De Gruyter Brand
  • Nov 22, 2021 Pub Date:
  • 9783110712513 ISBN-13:
  • 3110712512 ISBN-10:
  • English Language
  • 9.61 in * 0.24 in * 6.69 in Dimensions:
  • 0 lb Weight: