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Metal Impurities in Silicon-Device Fabrication (REV)

by Metal Impurities in Silicon-Device Fabrication (REV)

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Description

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.

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Product Details

  • Springer Brand
  • Feb 18, 2000 Pub Date:
  • 3540642137 ISBN-10:
  • 9783540642138 ISBN-13:
  • 285.0 pages Hardcover
  • English Language
  • 9 in * 0.75 in * 6 in Dimensions:
  • 2 lb Weight: